五一节休息期间，我就偷懒不发布新数据了
前些日子我发了数据：
有行业人士向我索要原始数据，我就借机发布一下，供大家使用
本表格内的数据都是来源于三家供应商的官方季度财报信息，由我手工记录，可能存在个别错误，请大家谅解
| 时期 | ASML | NIKON | CANON | ||||||||||||
| 合计 | EUV | ArF i | ArF | KrF | i-line | 合计 | ArF i | ArF | KrF | i-line | 合计 | KrF | i-line | ||
| 2010 | Q1 | 34 | 0 | 17 | 2 | 10 | 5 | 12 | 5 | 1 | 3 | 3 | 4 | 0 | 4 |
| Q2 | 43 | 0 | 25 | 2 | 12 | 4 | 10 | 4 | 0 | 2 | 4 | 5 | 1 | 4 | |
| Q3 | 51 | 0 | 23 | 2 | 21 | 5 | 8 | 6 | 0 | 0 | 2 | 10 | 2 | 8 | |
| Q4 | 69 | 0 | 29 | 6 | 25 | 9 | 15 | 9 | 1 | 4 | 1 | 10 | 3 | 7 | |
| 2011 | Q1 | 63 | 0 | 27 | 4 | 28 | 4 | 24 | 9 | 0 | 6 | 9 | 11 | 0 | 11 |
| Q2 | 63 | 0 | 26 | 4 | 27 | 6 | 18 | 5 | 0 | 4 | 9 | 8 | 2 | 6 | |
| Q3 | 55 | 2 | 25 | 3 | 18 | 7 | 24 | 3 | 0 | 12 | 9 | 11 | 2 | 9 | |
| Q4 | 41 | 1 | 23 | 0 | 14 | 3 | 19 | 5 | 1 | 6 | 7 | 22 | 3 | 19 | |
| 2012 | Q1 | 52 | 1 | 16 | 3 | 29 | 3 | 23 | 5 | 2 | 6 | 10 | 13 | 2 | 11 |
| Q2 | 44 | 0 | 18 | 0 | 22 | 4 | 9 | 3 | 0 | 1 | 5 | 19 | 1 | 18 | |
| Q3 | 40 | 0 | 22 | 0 | 13 | 5 | 5 | 3 | 1 | 0 | 1 | 8 | 0 | 8 | |
| Q4 | 34 | 0 | 16 | 1 | 14 | 3 | 9 | 3 | 3 | 0 | 3 | 6 | 0 | 6 | |
| 2013 | Q1 | 29 | 0 | 12 | 0 | 13 | 4 | 17 | 4 | 4 | 2 | 7 | 5 | 0 | 5 |
| Q2 | 38 | 0 | 18 | 0 | 15 | 5 | 3 | 0 | 1 | 2 | 0 | 12 | 2 | 10 | |
| Q3 | 34 | 0 | 20 | 0 | 10 | 4 | 9 | 0 | 2 | 1 | 6 | 10 | 0 | 10 | |
| Q4 | 56 | 1 | 27 | 2 | 26 | 0 | 6 | 1 | 3 | 1 | 1 | 16 | 4 | 12 | |
| 2014 | Q1 | 40 | 1 | 19 | 0 | 17 | 3 | 22 | 8 | 5 | 4 | 5 | 12 | 3 | 9 |
| Q2 | 31 | 1 | 24 | 2 | 2 | 2 | 1 | 0 | 0 | 0 | 1 | 17 | 5 | 12 | |
| Q3 | 30 | 2 | 13 | 0 | 10 | 5 | 5 | 1 | 1 | 2 | 1 | 13 | 2 | 11 | |
| Q4 | 35 | 1 | 20 | 1 | 10 | 3 | 6 | 1 | 0 | 2 | 3 | 12 | 4 | 8 | |
| 2015 | Q1 | 47 | 0 | 23 | 2 | 16 | 6 | 20 | 7 | 5 | 1 | 7 | 18 | 2 | 16 |
| Q2 | 41 | 1 | 19 | 2 | 14 | 5 | 7 | 0 | 0 | 4 | 3 | 19 | 7 | 12 | |
| Q3 | 44 | 0 | 14 | 2 | 24 | 4 | 9 | 3 | 2 | 1 | 3 | 20 | 4 | 16 | |
| Q4 | 37 | 0 | 11 | 3 | 20 | 3 | 6 | 0 | 0 | 1 | 5 | 23 | 8 | 15 | |
| 2016 | Q1 | 33 | 0 | 15 | 2 | 12 | 4 | 13 | 3 | 3 | 3 | 4 | 19 | 6 | 13 |
| Q2 | 46 | 2 | 19 | 2 | 16 | 7 | 6 | 0 | 0 | 2 | 4 | 12 | 2 | 10 | |
| Q3 | 40 | 1 | 19 | 1 | 14 | 5 | 11 | 2 | 3 | 1 | 5 | 14 | 5 | 9 | |
| Q4 | 38 | 1 | 17 | 1 | 15 | 4 | 8 | 4 | 3 | 0 | 1 | 19 | 6 | 13 | |
| 2017 | Q1 | 44 | 0 | 18 | 4 | 19 | 3 | 9 | 3 | 2 | 0 | 4 | 11 | 2 | 9 |
| Q2 | 42 | 2 | 16 | 3 | 14 | 7 | 5 | 2 | 2 | 0 | 1 | 19 | 8 | 11 | |
| Q3 | 55 | 4 | 22 | 2 | 18 | 9 | 6 | 1 | 1 | 1 | 3 | 15 | 4 | 11 | |
| Q4 | 57 | 5 | 20 | 5 | 20 | 7 | 6 | 0 | 3 | 1 | 2 | 25 | 10 | 15 | |
| 2018 | Q1 | 49 | 1 | 21 | 3 | 19 | 5 | 13 | 2 | 2 | 3 | 6 | 27 | 7 | 20 |
| Q2 | 58 | 7 | 19 | 5 | 19 | 8 | 7 | 0 | 2 | 0 | 5 | 32 | 12 | 20 | |
| Q3 | 53 | 5 | 22 | 3 | 18 | 5 | 10 | 1 | 3 | 1 | 5 | 25 | 6 | 19 | |
| Q4 | 64 | 5 | 24 | 5 | 22 | 8 | 6 | 2 | 2 | 1 | 1 | 30 | 7 | 23 | |
| 2019 | Q1 | 48 | 4 | 17 | 4 | 14 | 9 | 18 | 4 | 4 | 1 | 9 | 14 | 5 | 9 |
| Q2 | 48 | 7 | 13 | 3 | 19 | 6 | 7 | 2 | 2 | 1 | 2 | 21 | 8 | 13 | |
| Q3 | 57 | 7 | 21 | 9 | 14 | 6 | 11 | 3 | 4 | 0 | 4 | 22 | 1 | 21 | |
| Q4 | 76 | 8 | 31 | 6 | 18 | 13 | 10 | 2 | 3 | 2 | 3 | 27 | 8 | 19 | |
| 2020 | Q1 | 57 | 2 | 16 | 6 | 22 | 11 | 17 | 7 | 5 | 0 | 5 | 21 | 3 | 18 |
| Q2 | 61 | 7 | 17 | 7 | 23 | 7 | 3 | 0 | 1 | 1 | 1 | 31 | 4 | 27 | |
| Q3 | 60 | 14 | 11 | 2 | 23 | 10 | 6 | 2 | 3 | 1 | 0 | 31 | 8 | 23 | |
| Q4 | 80 | 8 | 24 | 7 | 35 | 6 | 7 | 2 | 2 | 0 | 3 | 39 | 10 | 29 | |
| 2021 | Q1 | 76 | 7 | 24 | 4 | 35 | 6 | 11 | 2 | 1 | 2 | 6 | 20 | 4 | 16 |
| Q2 | 72 | 9 | 16 | 7 | 31 | 9 | 1 | 0 | 0 | 1 | 0 | 30 | 9 | 21 | |
| Q3 | 79 | 15 | 21 | 6 | 30 | 7 | 9 | 1 | 0 | 2 | 6 | 39 | 10 | 29 | |
| Q4 | 82 | 11 | 20 | 5 | 35 | 11 | 8 | 1 | 2 | 0 | 5 | 51 | 15 | 36 | |
| 2022 | Q1 | 62 | 3 | 18 | 6 | 26 | 9 | ||||||||
| Q2 | |||||||||||||||
| Q3 | |||||||||||||||
| Q4 | |||||||||||||||
来源：半导体综研
赵工
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zhaojh@kw.beijing.gov.cn
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