CO2 (4N/5N) Tank

HCl Tank

N2O Trailer

NF3 Trailer

NH3 Y  Tank

SiH4 Y  Tank

0.95% F2/Ar/Ne Cylinder

0.95% F2/Kr/Ne Cylinder

20% F2/N2 Cylinder

Cl2 Cylinder

HBr Cylinder

NO Cylinder

SO2 Cylinder

BCl3  Cylinder

HF Cylinder

SiCl4 Cylinder

WF6  Cylinder

1% B2H6/H2 Cylinder

1% GeH4/H2 Cylinder

10% GeH4/H2 Cylinder

10% H2/N2 Cylinder

100% PH3 Cylinder

5%B2H6/AR Cylinder

5% B2H6/Ar Cylinder

5% SiH3CH3  Cylinder

65% PH3/H2  Cylinder

C2H2 Cylinder

C3H6 Cylinder

C4F6 Cylinder

CH2F2 Cylinder

CH3F Cylinder

CH4 Cylinder

CO Cylinder

Si2H6 Cylinder

SiH2Cl2  Cylinder

0.5% O2/He Cylinder

1.2% He/N2 Cylinder

1.25% Kr/Ne Cylinder

3.5% Ar/Xe/Ne Cylinder

30% O2/He Cylinder

4% CH4/Ar (NR) Cylinder

4% H2/N2 Cylinder

5% H2/He Cylinder

C4F8 Cylinder

CF4 Cylinder

CHF3 Cylinder

SF6 Cylinder

Xe Cylinder

来源：湘鄂皖半导体信息